| ISO 等級 | ≥0.1 μm | ≥0.2 μm | ≥0.3 μm | ≥0.5 μm | ≥1 μm | ≥5 μm |
|---|---|---|---|---|---|---|
| ISO 1 | 10 | 2 | - | - | - | - |
| ISO 2 | 100 | 24 | 10 | 4 | - | - |
| ISO 3 | 1,000 | 237 | 102 | 35 | 8 | - |
| ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | - |
| ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO 7 | - | - | - | 352,000 | 83,200 | 2,930 |
| ISO 8 | - | - | - | 3,520,000 | 832,000 | 29,300 |
| ISO 9 | - | - | - | 35,200,000 | 8,320,000 | 293,000 |
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